About: http://webisa.webdatacommons.org/424873456

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Next, an isolation layer using a material such as silicon dioxide or similar material chosen for etching characteristics that differ from those of the separation layer is formed over the separation layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de