About: http://webisa.webdatacommons.org/424983597

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A reactive ionic sputtering apparatus comprises, as shown in FIG. 4, a chamber 8 having an inlet 80 to introduce gases such as hydrogen and argon and an outlet 81 for the pumping of gases.
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com