| http://www.w3.org/ns/prov#value | - reduction in alignment time.[Device Manufacturing Method]A device manufacturing method using the above-mentioned semiconductor manufacturing apparatus will be described.FIG. 8 shows the flow of the manufacture of a microdevice (e.g., a semiconductor chip such as an IC or LSI, a liquid crystal panel, a CCD, a thin-film magnetic head, or a micromachine).
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