About: http://webisa.webdatacommons.org/425476615

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It is preferable that the auxiliary substrate 20 is of a material such as silicon or glass that can be processed with ease and is substantially equal in thermal expansion coefficient to silicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com