About: http://webisa.webdatacommons.org/425723462

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The inventive microdevices may be manufactured using any of various low-cost microfabrication methods such as laser ablation and laser etching, photolithography, and other techniques.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk