About: http://webisa.webdatacommons.org/425788677

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The access transistor is formed over a substrate 22, preferably silicon or a compound including silicon (Si) and germanium (Ge), with a surface upon which the gate structure 10 rests.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr