About: http://webisa.webdatacommons.org/425902180

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The mask films are replaceable by other carbon-containing materials that also contain other elements, such as Si or Ge or the like in addition to carbon as the main component thereof.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com