About: http://webisa.webdatacommons.org/426131994

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thereafter, the residuals can be removed from the metal layer 30 and from the seed layer 26 with a plasma, such as O2 plasma or plasma containing fluorine of below 200 PPM and oxygen.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com