About: http://webisa.webdatacommons.org/426262949

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The invention provides systems and methods for generating setup information, such as models and/or recipes, for use measuring process parameters associated with semiconductor devices.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com