About: http://webisa.webdatacommons.org/426279634

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then an insulating film mainly containing silicon is formed to serve as a gate insulating film 1107.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk