About: http://webisa.webdatacommons.org/426282635

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When the radio frequency is applied to between the electrodes placed at the peripheral surface, the plasma mainly etch off the materials deposited on the inner surface of the reactor.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es