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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, an insulating film mainly containing silicon is formed to serve as a gate insulating film 607.
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com