About: http://webisa.webdatacommons.org/426538327

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, sputtering gas such as Ar and Xe is supplied into this chamber so as to impinge the Bi target.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com