| http://www.w3.org/ns/prov#value | - The fixed abrasive elements 273 can be selected from alumina, titania, ceria; silica, calcium carbonate or other substances that are effective at removing material from the microelectronic substrate 112 (FIG. 3D), and are also compatible with both the photopolymer resist material 253 and the processes discussed above with reference to FIGS. 3A-3D.
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