About: http://webisa.webdatacommons.org/426677191

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate 10 may be dry etched using a gas mixture of a halogen gas, such as HBr or C12, and O2.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com