About: http://webisa.webdatacommons.org/426681597

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, the reflected and diffracted light (or scattered light) is emitted from the surface of the inspecting object 1, the circuit pattern, and the defect such as the foreign material.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es