About: http://webisa.webdatacommons.org/426731316

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As shown FIG. 3 (a), a plurality of through holes 20 are formed in an absorption-side insulating substrate 14 made of an insulating material such as a ceramic material or polyimide resin.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com