PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • FIG. 7 shows the component after the next step, in which a thin metallization M has been applied to the entire surface of the substrate and chip from the back, for example via sputtering.
http://www.w3.org/ns/prov#wasQuotedFrom
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