| http://www.w3.org/ns/prov#value | - As with the X, Y and Z stages 312, 314 and 316, the screw drive motion control mechanisms 540 may use a variety of types of motors, such as linear motors, stepper motors, servo-motors, or the like, as long as they are capable of providing the desired translation of the platform 544 (including platen 258, carrier 250, manipulators 252 a-d, probes 256).
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