About: http://webisa.webdatacommons.org/426924341

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In one embodiment, the patterning may be carried out using a lithographic process although other patterning processes such as ablation, ruling, or other techniques will be apparent to those skilled in the art.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com