About: http://webisa.webdatacommons.org/426948372

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In FIG. 7, reference numerals 23, 24, and 25 denote LSI chips; 26, 27, and 28 represent cooling blocks; and 29 is a substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com