About: http://webisa.webdatacommons.org/427018201

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In one aspect, the present invention is a method of adjusting the DC bias on one chamber electrode relative to another electrode by interposing a dielectric shield between one of the electrodes and the plasma.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es