About: http://webisa.webdatacommons.org/427147310

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In semiconductor industry, dry etching is widely used in various steps for fabricating various kinds of semiconductor devices.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com