About: http://webisa.webdatacommons.org/427203489

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In many tilting mirror designs, the MEMS device is etched out of a silicon substrate, with the control surface coated with a reflective material such as gold or aluminum, leaving a mirror on a bearing surface.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com