About: http://webisa.webdatacommons.org/427217263

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	On the other hand, the upperhand of the transfer robot 104 is a drop-in hand for gripping a peripheral edge portion of a semiconductor wafer W. The upper hand is used only when returning a semiconductor wafer
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com