About: http://webisa.webdatacommons.org/427639231

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	SiF4(g) + ??G0.Given plasma parameters settings such as flow rate, pressure, and ICP power will produce a given ???F??? partial pressure available for the removal of silicon.
http://www.w3.org/ns/prov#wasQuotedFrom	electroiq.com