About: http://webisa.webdatacommons.org/427705064

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 7 is a graph showing the organic substance content characteristics of silicon oxide films formed by the first embodiment of the invention and by the conventional method.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr