About: http://webisa.webdatacommons.org/427737664

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 18 is a graphical representation of a finite element stress analysis of a silicon proof mass supported by hinged support beams in an embodiment of the present invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au