About: http://webisa.webdatacommons.org/42828578

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1 is a top view, partly in section, showing an ion beam implanter including an ion source, beam forming and shaping structure and an implantation chamber;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com