About: http://webisa.webdatacommons.org/428331458

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Plugs 15 made of a conductive material such as aluminum (Al) or tungsten (W) are embedded in these contact holes FC1.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com