About: http://webisa.webdatacommons.org/428610866

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Moreover, as the sputtering gas other than Ar gas, He, Ne, Xe, H2, NH3, CF4, C2F6 and C4F8 gases may be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com