About: http://webisa.webdatacommons.org/428742601

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, an external RF generator will transmit energy to a graphite susceptor within a quartz reaction chamber which, in turn, heats substrates positioned thereon, such as silicon wafers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com