About: http://webisa.webdatacommons.org/428816342

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, the present invention is not limited to the formation of a conductive material-based interconnect above the surface of a semiconducting substrate such as a silicon wafer, for example.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca