About: http://webisa.webdatacommons.org/428853322

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For this purpose, a conductive layer, for example of TiN, Pt, W. RuO2 or n+ -doped polysilicon, is deposited.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es