About: http://webisa.webdatacommons.org/428963258

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A plasma etching apparatus 114 has a processing chamber 16 whose side wall and bottom portion, for example, are made of a conductor such as aluminum.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es