About: http://webisa.webdatacommons.org/429028110

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	(5) External Links: USPTO, USPTO Assignment, EspacenetPolishing machines including under-pads and methods for mechanical and/or chemical-mechanical polishing of microfeature workpieces
http://www.w3.org/ns/prov#wasQuotedFrom	google.com