About: http://webisa.webdatacommons.org/429172160

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Preferably the layer being polished is a metal layer, e.g., a tantalum layer, and the layer underneath the layer being polished is another metal layer, an adhesion layer, or a dielectric layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es