About: http://webisa.webdatacommons.org/429244952

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	With respect to such a request, a material containing silicon such as a silicon oxide layer and a silicon oxide nitride layer, etc., as a component element was suitable.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com