PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Dielectric layer 350 may include any suitable dielectric material or materials, including silicon dioxide (SiO2), silicon nitride (SiN), silicon oxynitride (SiON), phosphosilicate glass (PSG), borophosphosilicate glass (BPSG), fluoropolymer, parylene, polyimide, any suitable spin-on glass, or any suitable spin-on polymer for example.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com