About: http://webisa.webdatacommons.org/429299702

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Air and other inert gases may be used as the pressurized fluid, as may liquids such as water and other liquids that do not react with chuck 22, substrate 24 and film 26.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com