About: http://webisa.webdatacommons.org/429426563

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Microelectromechanical or ???MEMS??? chips include microscopic electromechanical devices, e.g., acoustic transducers such as microphones, which must be covered by a cap.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com