About: http://webisa.webdatacommons.org/429822632

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Actuator 904 may be a piezo-electric actuator, an electrical actuator, an acoustic actuator, and air operated actuator, or other actuator configured to deliver a broadband impulse to the substrate support member.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com