About: http://webisa.webdatacommons.org/42986935

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As gate insulating layers 205 a and 205 b, a material such as silicon oxide, silicon oxynitride, hafnium oxide (HfOx), aluminum oxide (AlxOy)(x>y>0), or tantalum oxide (TaxOy, x>y>0) can be applied.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com