| http://www.w3.org/ns/prov#value | - FIG. 12A is a plan view showing a physical quantity sensor formed by the positioning method according to the prior art, FIG. 12B is a cross sectional view showing the sensor taken along line XIIB-XIIB in FIG. 12A, and FIG. 12C is a cross sectional view showing the sensor taken along line XIIC-XIIC in FIG. 12A.
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