About: http://webisa.webdatacommons.org/430589250

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A less than 2,000 Angstroms, such as 500 to 1700 Angstroms, most preferably about 1200 Angstroms, thick silicon dioxide film is sputtered over the silicon film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com