About: http://webisa.webdatacommons.org/430658233

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	llel to a major surface of said substrate, further including a trench formed in said semiconductor substrate at the edge of said silicon-on-insulator region. 8.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com