About: http://webisa.webdatacommons.org/430755127

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A material of forming the etching monitoring layer 9 may include, for example, a carbon material such as carbon, DLC or the like, an oxide material such as Al2O3, a metal material such as Ta (tantalum), W (tungsten) or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com