About: http://webisa.webdatacommons.org/430857017

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As a material of the protective layer, inorganic materials such as aluminum nitride, aluminum oxide, silicon nitride, silicon nitride oxide, and silicon oxynitride can be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com