About: http://webisa.webdatacommons.org/431036633

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Currently, materials such as W, Ti, Ta, Co, their nitrides and silicides, Zr, Hf, SiGe, can be deposited in this deep trench structures via atomic layer deposition (ALD) and chemical vapor deposition (CVD).
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr