| http://www.w3.org/ns/prov#value | - Further, optical layers made of at least two kinds of dielectric materials different in the optical constant can be alternately formed in multiple layers on the substrate 8 by receiving an energy of ions in a plasma accelerated by a negative bias voltage introduced from a RF power supply system 12 or Ar ion irradiation from the above ion source 14, as the case requires.
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